The Carl Zeiss AURIGA workstation is a sophisticated multi-functional platform based on a high-performance field emission scanning electron microscope combined with a powerful focused ion beam (FIB) system operating in analogue mode. It is equipped with an advanced silicon drift detector (SDD) energy dispersive spectrometer (EDS) and a super high-speed detector electron back-scattered diffraction (EBSD) analytical system. The superior simultaneous multi-channel data acquisition and analysis system makes this compact instrument a unique facility suitable for a number of applications including: subsurface inspection and measurement at the submicron scale, quantitative compositional and morphological analyses, in-situ fabrication and modification of micro-devices, site-specific sample preparation for TEM analysis, orientation imaging and indexing, 3D slicing and imaging, e.g. 3D EBSD, 3D EDS analysis. The AURIGA can be used to examine a wide range of dry and conductive specimens (coating prior to loading into the chamber is required for non-conductive materials). Its unique stage motion control system enables it to hold a wide range of sample sizes and also to navigate between multiple indexed samples. The specially designed ultra-thin film EDS detection capacity make it possible for simultaneous FIB slice milling and EDS mapping.

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